铝合金表面有机污染物等离子体清洗机理及验证

针对惯性约束核聚变装置中铝合金零件表面的有机污染去除问题,提出大气常压等离子清洗方式。 通过有限元方法研究等离子清洗机理,并通过铝合金零件的清洗试验进行验证,从而实现聚变装置中机械零件的超洁净制造。 研究结果表明:通过建立等离子表面清洗的热力学耦合方程,仿真分析得到清洗应力随清洗距离的减小而增大, 随清洗速度和基体厚度的增大而减小。 通过试验验证了铝合金零件在等离子清洗后表面自由能增大,极性分量与色散分量都有所增加,并且在等离子清洗过程中清洗的距离比清洗速度对清洗效果影响更大,清洗距离为 5 mm 时最好。

Mechanism and Verification of Plasma Cleaning of Organic Contaminant on Aluminum Alloy Surface

In order to remove the organic contamination on the surface of aluminum alloy elements in the inertial confinement fusion facility, the atmospheric pressure plasma cleaning method is proposed. The plasma cleaning mechanism was studied by fi- nite element method and verified by the cleaning experiment of aluminum alloy elements, so as to realize the ultra-clean manufac- turing of mechanical elements in the fusion facility. Results show that the cleaning stress increases with the decrease of cleaning distance and decreases with the increase of cleaning speed and matrix thickness by establishing the thermodynamic coupling e- quation of plasma surface cleaning. Experiments have verified that the surface free energy of aluminum alloy elements increases after plasma cleaning, and both polarity and dispersion components increase. Moreover, the cleaning distance in the plasma cleaning process has a greater impact on the cleaning effect than the cleaning speed. It is shown that the best cleaning effect can be obtained at cleaning distance of 5 mm.