| 硬质合金刀具基体沉积低表面粗糙度金刚石薄膜的工艺研究 |
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| 引用本文： | 陈明,孙方宏,张志明,沈荷生,胡德金. 硬质合金刀具基体沉积低表面粗糙度金刚石薄膜的工艺研究[J]. 工具技术, 2000, 34(3): 9-13 |
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| 作者姓名： | 陈明 孙方宏 张志明 沈荷生 胡德金 |
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| 作者单位： | 上海交通大学机械工程学院,200030 |
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| 基金项目： | 国家863计划资助项目 |
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| 摘 要： | CVD金刚石薄膜刀具的表面粗糙度是影响刀具切削性能的重要参数。为通过改进CVD沉积工艺减小金刚石薄膜表面粗糙度 ,提出了适当提高碳源浓度和合理控制沉积气压两项新的工艺方法 ,并通过切削试验研究了其对金刚石薄膜刀具耐用度及切削性能的影响
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| 关 键 词： | CVD金刚石薄膜 表面粗糙度 碳源浓度 沉积气压 |
Investigation on Technology of Depositing Low Surface Roughness Diamond Thin Film on Cemented Carbide Tools |
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| Chen Ming. Investigation on Technology of Depositing Low Surface Roughness Diamond Thin Film on Cemented Carbide Tools[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2000, 34(3): 9-13 |
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| Authors: | Chen Ming |
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| Abstract: | The surface roughness of CVD diamond thin film coated tools is an important parameter having influence on the tool cutting performance. To lower the surface roughness of diamond thin films by improving the CVD depositing technology, two kinds of new technical methods are proposed by appropriately increasing the carbon source concentration and controlling the deposition pressure. The effects of the new technologies on the tool life and cutting performance are investigated through cutting tests. |
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| Keywords: | CVD diamond thin film surface roughness carbon source concentration deposition pressure |
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