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Gallium nitride MEMS resonators: how residual stress impacts design and performances |
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| Authors: | Morelle Christophe Théron Didier Derluyn Joff Degroote Stefan Germain Marianne Zhang Victor Buchaillot Lionel Grimbert Bertrand Tilmant Pascal Vaurette François Roch-Jeune Isabelle Brandli Virginie Avramovic Vanessa Okada Etienne Faucher Marc |
| Affiliation: | 1.Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520-IEMN, F-59000, Lille, France ;2.EpiGaN nv, Kempische steenweg 293, 3500, Hasselt, Belgium ; |
| Abstract: | Microsystem Technologies - Starting from Gallium Nitride epitaxially grown on silicon, pre-stressed micro-resonators with integrated piezoelectric transducers have been designed, fabricated, and... |
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