1.Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520-IEMN, F-59000, Lille, France ;2.EpiGaN nv, Kempische steenweg 293, 3500, Hasselt, Belgium ;
Abstract:
Microsystem Technologies - Starting from Gallium Nitride epitaxially grown on silicon, pre-stressed micro-resonators with integrated piezoelectric transducers have been designed, fabricated, and...