|
|||||
|
|
Design and analysis of a novel MEMS spiral inductor with high quality factor |
|
| Authors: | Azizollah Ganji Bahram Kheiry Sanaz |
| Affiliation: | 1.Department of Electrical Engineering, Babol Noshirvani University of Technology, Babol, Iran ; |
| Abstract: | Microsystem Technologies - In this paper a novel spiral inductor with high quality (Q)-factor is presented. Non-uniform current density distribution, especially in inner turn, increases the... |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |