Design and analysis of a novel MEMS spiral inductor with high quality factor |
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Authors: | Azizollah Ganji Bahram Kheiry Sanaz |
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Affiliation: | 1.Department of Electrical Engineering, Babol Noshirvani University of Technology, Babol, Iran ; |
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Abstract: | Microsystem Technologies - In this paper a novel spiral inductor with high quality (Q)-factor is presented. Non-uniform current density distribution, especially in inner turn, increases the... |
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