Design and simulation of RF MEMS comb drive with ultra-low pull-in voltage and maximum displacement |
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| Authors: | Nashat Salah El Din AbdelRassoul Roshdy Abd El Bary Abd El Moneim |
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| Affiliation: | 1.Electronics and Communications Engineering Department, College of Engineering and Technology, Arab Academy for Science, Technology and Maritime Transport, Alexandria, Egypt
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| Abstract: | Microsystem Technologies - Comb drive actuators are very important microelectromechanical systems structures that are widely used in many applications. They are currently used in force balanced... |
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