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Single layer thin photoresist soft etch mask for MEMS applications |
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| Authors: | Joyce Robin Panwar Deepak Kumar Shakil Moh. Varghese Soney Akhtar Jamil |
| Affiliation: | 1.Nanomaterials and Devices Research Laboratory, School of Nano Science and Technology, NIT, Calicut, Kerala, India ;2.Sensors and Nanotechnology Group, CSIR-CEERI, Pilani, Rajasthan, India ; |
| Abstract: | Microsystem Technologies - Substrate masking plays an important role in wet chemical etching process, however; coating a cost effective masking material with higher stability in the harsh chemical... |
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