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Design optimization of high performance tapping mode AFM probe |
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| Authors: | Li Zhenhua Shi Tielin Xia Qi |
| Affiliation: | 1.The State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, China ; |
| Abstract: | Microsystem Technologies - To enhance the measurement performance of tapping-mode atomic force microscopy (TM-AFM), it is highly desirable that the TM-AFM probe has high resonant frequency and... |
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