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Large scale fabrication of asymmetric 2D and 3D micro/nano array pattern structures using multi-beam interference lithography technique for Solar cell texturing application |
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| Authors: | Kirubaraj A. Alfred Moni D. Jackuline Devaprakasam D. |
| Affiliation: | 1.Department of Electronics and Communication Engineering, Karunya University, Coimbatore, 641114, India ;2.School of Mechanical and Building Sciences, VIT Chennai Campus, Chennai, 600127, India ; |
| Abstract: | Microsystem Technologies - A method for the large scale fabrication of nano/micro array patterned structure for solar Photovoltaics (PV) is demonstrated by the use of laser interference lithography... |
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