Squeeze film air damping ratio analysis of a silicon capacitive micromechanical accelerometer |
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| Authors: | Mo Yuming Du Lianming Qu BingBing Peng Bo Yang Jie |
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| Affiliation: | 1.Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, 621900, Sichuan, China
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| Abstract: | Microsystem Technologies - The dynamics behavior of most micro-electro-mechanical-system (MEMS) devices is significantly affected by the squeeze-film air damping. Therefore, the correct prediction... |
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