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Channel resolution enhancement through scalability of nano/micro-scale thickness and width of SU-8 polymer based optical channels using UV lithography |
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| Authors: | Amiri Iraj S Sorger Volker J Ariannejad M M Ling Xi Ghasemi M Yupapin P |
| Affiliation: | 1.Computational Optics Research Group, Ton Duc Thang University, Ho Chi Minh City, Vietnam ;2.Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City, Vietnam ;3.Department of Electrical and Computer Engineering, The George Washington University, Washington, DC, 20052, USA ;4.Photonics Research Centre, University of Malaya, 50603, Kuala Lumpur, Malaysia ;5.Division of Materials Science and Engineering, Department of Chemistry, Boston University, 590 Commonwealth Ave, Boston, MA, 02215, USA ;6.Faculty of Electrical and Electronics Engineering, Ton Duc Thang University, District 7, Ho Chi Minh City, Vietnam ; |
| Abstract: | Microsystem Technologies - This paper reports on an approach for fabrication of micro-channels with nanometer thickness achieved by optimization of UV lithography processes. Rectangular... |
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