铁电薄膜铁电性能的测量

本文介绍了铁电薄膜材料铁电性能的测量原理和方法.分析了以传统测量电路Sawyer-Tower电路为基础的电滞回线测量方法和基于虚地模式的电滞回线测量方法,并提出了一种基于计算机的铁电性能综合测试仪的实现方案,对其中的主要部分微电流放大器的设计作了介绍.该测试仪不仅能画出铁电薄膜的电滞回线,还可以得到铁电薄膜材料的饱和极化Ps、剩余极化Pr、矫顽场Ec、漏电流Ik等参数,以及对铁电薄膜材料的铁电疲劳性能、铁电保持性能的测试.

Measurement on Ferroelectic Performance of Ferroelectic Thin Films

This paper introduces the measurement principle and method of the ferroelectic performance of ferroelectic thin films. It also discusses measuring methods of the ferroelectric hystersis loop based on Sawyer-Tower method and virtual ground method, and presents an implementation scheme of ferroelectic performance tester based on PC computer. The tester can give hysteresis loop,maximum polarization 'Ps',remanant polarization 'Pr',coercive field 'Ec' , leakage current 'Ik' , fatigue and retain measurements. The paper describes the design scheme of microcurrent amplifier as well.