Flexible optical waveguide film fabrications and optoelectronic devices integration for fully embedded board-level optical interconnects |
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Authors: | Choi C Lin L Yujie Liu Jinho Choi Li Wang Haas D Magera J Chen RT |
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Affiliation: | Univ. of Texas, Austin, TX, USA; |
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Abstract: | This paper demonstrates a flexible optical waveguide film with integrated optoelectronic devices (vertical-cavity surface-emitting laser (VCSEL) and p-i-n photodiode arrays) for fully embedded board-level optical interconnects. The optical waveguide circuit with 45/spl deg/ micromirror couplers was fabricated on a thin flexible polymeric substrate by soft molding. The 45/spl deg/ couplers were fabricated by cutting the waveguide with a microtome blade. The waveguide core material was SU-8 photoresist, and the cladding was cycloolefin copolymer. A thin VCSEL and p-i-n photodiode array were directly integrated on the waveguide film. Measured propagation loss of a waveguide was 0.6 dB/cm at 850 nm. |
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