New type of linear ultrasonic actuator based on a plate-shaped vibrator with triangular grooves

This paper presents a new type of linear ultrasonic actuator that can drive a slide by ultrasound. The ultrasonic actuator consists of a metal plate with uniform triangular grooves, multilayer piezoelectric vibrator, and supporting structure. The multilayer piezoelectric vibrator is used to excite a flexural vibration in the metal plate that is adjusted to lie horizontally. When the metal plate vibrates, a glass slide on it is levitated in the vertical direction and linearly driven along the length direction. Experimental characteristics of the prototype are presented here. This is the first report case of using the sound field that is generated by a grooved metal plate, to drive a slide levitated by acoustic radiation force.