微气流角速度传感原理及几个关键问题

研究了密闭腔内定向微流体的角速度敏感原理、驱动控制及气流效应检测.基于哥氏效应和热平衡方程建立了气体流速及热敏丝温度变化之间的关系模型,获得了输入角速度与传感检测输出电压信号间的传递关系;利用挤压膜阻尼探讨了微气流与其驱动机构的振动耦合,分析了密闭腔体结构以及热敏丝设置等对气流效应及检测的影响,结果表明,圆柱腔体及平行热敏丝可有效避免气流效应的交叉耦合.

Sensing Principle of Micro Airflow Angular Rate and Several Related Key Techniques

To investigate the sensing principle of angular rate,actuating and measuring of directed micro airflow inside the sealed cavity,the transfer relation model between the signal of input angular rate and the output voltage is established according to the Coriolis effect and equation of heat balance.Several key techniques such as the actuating and controlling of micro airflow and the measuring of effect of micro fluid are discussed.And the influences of the structure of the sealed cavity and the setup of hot wires on the micro fluid and related measuring are analysed separately.The comparison shows that the cross coupling of micro airflow can be inhibited effectively by employing the cylindrical cavity and parallel wire.