| Micro—nano electromechanical system by bulk silicon micromachining |
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| 引用本文： | 1 Introduction MEMS (Micro ElectroMechanical System) based on semiconductor microfabrication playsimportant roles for example in the periphery of IT systems. NEMS (Nano ElectroMechanicalSystem) contains nano-scale structures. Sophisticated and high performance systems basedon the MEMS and the NEMS have been developed. Packaging and electrical interconnectionplay an important role in realizing practically applicable systems[1]. ……. Micro—nano electromechanical system by bulk silicon micromachining[J]. 光学精密工程, 2002, 10(6): 608-613 |
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| 作者姓名： | 1 Introduction MEMS (Micro ElectroMechanical System) based on semiconductor microfabrication playsimportant roles for example in the periphery of IT systems. NEMS (Nano ElectroMechanicalSystem) contains nano-scale structures. Sophisticated and high performance systems basedon the MEMS and the NEMS have been developed. Packaging and electrical interconnectionplay an important role in realizing practically applicable systems[1]. …… |
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| 作者单位： | [1]NewIndustryCreationHatcheryCenter（NICHe）,TohokuUniversity [2]GraduateSchoolofEngineering,TohokuUniversitySendai,980－8579 |
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| 摘 要： |
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| 关 键 词： | 微纳电械系统 MEMS 体硅微加工工艺 |
| 收稿时间： | 2002-10-17 |
| 修稿时间： | 2002-11-16 |
Micro-nanoelectromechanical system by bulk silicon micromachining |
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| MasayoshiEsashi TakahitoOno. Micro-nanoelectromechanical system by bulk silicon micromachining[J]. Optics and Precision Engineering, 2002, 10(6): 608-613 |
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| Authors: | MasayoshiEsashi TakahitoOno |
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| Affiliation: | New Industry Creation Hatchery Center (NICHe), Tohoku University+ Graduate School of Engineering, Tohoku University Sendai, 980-8579 |
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| Abstract: | MEMS(Micro ElectroMechanical System)based on semiconductor microfabrication plays im-portant roles for example in the periphery of IT systems.N EMS(Nano Elect roMechanical Sys-tem)contains nano-scale structures.Sop histicated and high performance systems based on the MEMS and the NEMS have been developed.Packaging and elect rical interconnection play an important role in realizing practically applicable systems. |
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