| 新颖型弹性膜硅加速度传感器芯片的设计 |
| |
| 引用本文： | 邓永和.新颖型弹性膜硅加速度传感器芯片的设计[J].电子质量,2003(8):49-50. |
| |
| 作者姓名： | 邓永和 |
| |
| 作者单位： | 湖南工程学院数理系,湖南,湘潭,411100 |
| |
| 摘 要： | 介绍了最新设计的双E型硅传感器芯片的制作工艺。通过控制不同敏感硅芯片弹性膜的厚度,即可制得不同量程的双E型敏感硅芯片和加速度传感器。
|
| 关 键 词： | 厚膜 硅芯片 加速度传感器 |
Research on design of new Elastomeric film silicon accelerometer chip |
| |
| DENG Yong-he Dept. of Mathematics and Physics Hunan Institute of Engineering,Xiangtan Hunan,China.Research on design of new Elastomeric film silicon accelerometer chip[J].Electronics Quality,2003(8):49-50. |
| |
| Authors: | DENG Yong-he Dept of Mathematics and Physics Hunan Institute of Engineering Xiangtan Hunan China |
| |
| Affiliation: | DENG Yong-he Dept. of Mathematics and Physics Hunan Institute of Engineering,Xiangtan Hunan,411100,China |
| |
| Abstract: | This paper introduces the producing technology of newly designed dual-E silicon sensor chip, which produces dual-E sensitive silicon chip and accelerometer sensor with different scale. |
| |
| Keywords: | thick film silicon chip accelerometer sensor |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
