Sol-Gel Alumina Coating for Improved Cyclic Oxidation Resistance of Silicon Nitride |
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| Authors: | Irina Tsarenko Sang Park Honghua Du Woo Y Lee |
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| Affiliation: | Department of Chemical, Biochemical, and Material Engineering, Stevens Institute of Technology, Hoboken, New Jersey 07030 |
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| Abstract: | A 25 nm thick α-alumina layer was deposited on a turbine-grade silicon nitride by sol-gel dip coating and subsequent heat treatment in air at 1200°C. This layer had a nanometer grain structure. Silicon nitride protected by this thin layer showed a significant improvement in oxidation resistance over its uncoated counterpart after 200 cyclic exposures in air at 1250°C. The oxide layer grown on the coated silicon nitride also exhibited superior surface morphology, compared with the uncoated silicon nitride. |
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| Keywords: | alumina sol-gel thin films silicon nitride oxidation |
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