异形回转零件的一种图像测量研究

讨论了利用线阵CCD图像测量方法。配备Z、Y二维运动工作台及绕Z轴回转数显工作台,对异形回转体三维轮廓尺寸进行检测,用Mar边缘检测算子对CCD获得的原始灰度图像进行处理,采取最小二乘法完成曲线拟合,以获得亚像元分辨率。在对Φ200mm异形回转体零件进行尺寸测量时,测量系统的分辨率达到微米级的水平。

Study on an Image Measurement for Irregular Rotary Objects

An image metrology method using linear array CCD camera is discussed in this paper. With the digital display working table that can move in Z、Y dimensions and rotate around the Z-axis, the 3-D external profile of an irregular rotary object is detected. In order to get the sub-pixel resolution, the original data image from CCD is processed by Marr's edge position detecting algorithm, and the zero-cross position is detected by the least square fitting method. In the measurement of an irregular rotary part which has the size of Φ200 mm, the measure resolution of the detecting system reaches the μm level.