| 高功率等离子磁控溅射法制备含钛类金刚石碳膜(英文) |
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| 引用本文： | SUNG Chia-chi,FUH Yiin-kuen,LO Chih-hung. 高功率等离子磁控溅射法制备含钛类金刚石碳膜(英文)[J]. 中国有色金属学会会刊, 2012, 22(6): 1381-1386. DOI: 10.1016/S1003-6326(11)61329-0 |
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| 作者姓名： | SUNG Chia-chi FUH Yiin-kuen LO Chih-hung |
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| 作者单位： | Department of Engineering Science and Ocean Engineering,National Taiwan University,Taipei;Department of Mechanical Engineering,National Central University,Chung li;National Nano Device Laboratories,Hsinchu |
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| 摘 要： | 为了改善类金刚石碳膜的性能,采用高功率等离子磁控溅射法将含钛非晶碳薄膜沉积在304不锈钢基材上,气源为C2H2-Ar混合气体,金属钛为阴极靶材。为了改善附着力和降低残余应力,制备了含Ti/TiC/DLC多层结构的镀膜。利用GDS、XRD、SEM、Raman光谱法、纳米压痕仪和盘-销摩擦计研究基材偏压及基材与靶材的距离对薄膜性能的影响。结果表明,薄膜具有优良的粘合强度和韧性。
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| 关 键 词： | 高功率等离子磁控溅射 金属-类金刚石碳膜 类金刚石碳膜 |
| 收稿时间： | 2011-10-17 |
Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering |
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| YANG Peng,SUNG Chia-chi,FUH Yiin-kuen,CHU Chun-lin,LO Chih-hung,.. Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering[J]. Transactions of Nonferrous Metals Society of China, 2012, 22(6): 1381-1386. DOI: 10.1016/S1003-6326(11)61329-0 |
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| Authors: | YANG Peng SUNG Chia-chi FUH Yiin-kuen CHU Chun-lin LO Chih-hung . |
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| Affiliation: | Department of Engineering Science and Ocean Engineering,National Taiwan University,Taipei;2.Department of Mechanical Engineering,National Central University,Chung li;3.National Nano Device Laboratories,Hsinchu |
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| Abstract: | To improve the characteristics of a diamond-like carbon(DLC) film,Ti-containing amorphous hydrogenated carbon thin films were deposited on sus304 stainless steel substrates by high-power plasma-sputtering with titanium metal as the solid plasma source in a mixed ArC2H2 atmosphere.The films were fabricated to obtain a multilayered structure of Ti/TiC/DLC gradient for improving adhesion and reducing residual stress.The effects of substrate bias and target-substrate distance on the films’ properties were studied by glow discharge spectroscope,X-ray diffractometer,Raman spectroscope,nanoindenter,and a pin-on-disk tribometer.The results indicate that the films possess superior adhesive strength and toughness. |
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| Keywords: | high-power plasma-sputtering Me-DLC diamond-like carbon |
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