基于平板扫描器的新型AFM系统

研制了一种基于平板扫描器的新型原子力显微镜(AFM)系统。该系统创新地把二维平板扫描器和一维反馈控制器相结合,有效地克服了传统扫描器Z向反馈控制与XY扫描平面之间的非线性交叉耦合误差,同时保证了大范围扫描时检测光路的稳定性。利用该系统与传统AFM作了氧化铝薄膜和光栅对比扫描实验,结果表明这种AFM系统能够获得无扭曲、规则的理想图像。

A new type of atomic force microscope system based on plate scanner

A novel atomic force microscope(AFM)system based on plate scanner is developed.We innovatively integrates two-dimensional plate scanner with one-dimensional feedback controller,which effectively overcomes the nonlinear cross-coupling error between Z feedback control and XY scan plane in the traditional scanner,and furthermore guarantees the stability of detection beam path with large scan range.The scan comparison experiments of the alumina films and the optical gratings have been done by using the system and the traditional AFM respectively.The results indicate that the regular images of the sample surface with no distortion are successfully gained.