振动轮式微机械陀螺动态特性光学测试方法研究

振动轮式微机械陀螺尺寸小、振动频率高，为了精确评价其动态特性，建立了基于高速摄像技术、显微技术与数字图像相关技术的光学测试系统。配有光学显微镜的高速摄像设备(32000fps)记录并保存被测物瞬时序列图像，根据被测物的角振动特性设计相应的图像相关计算方法以获得振子各时刻的运动位移，并通过位移时间曲线分析振子的固有频率、阻尼系数及品质因子等动态特性参数。实验结果显示，图像相关精度达0.01像素，频率测量误差小于0.01%。高精度地测量了振动轮式微机械陀螺的动态特性，为微结构动态特性的研究提供了一个有效方法。

Optical testing of Dynamic characteristic of Vibrating Wheel Micromechanical Gyroscope

To evaluate the dynamic characteristic of vibrating wheel micromechanical gyroscope, an optic testing system based on high speed camera system combining with microscope and digital image correlation technique is setup. A sequence of real time images of tested object are recorded and saved by high speed camera (32000fps) equipped microscope, then the corresponding image correlation method for angular vibrating characteristic was applied to figure out movement displacement of vibrator, and the dynamic characteristic of vibrator such as nature frequency, damp coefficient and quality factor can be obtained. As experimental results shown, the precision of image correlation will approach 0.01 pixel, the measurement error was less than 0.01%. This testing system realizes a high precision dynamic characteristic measurement for vibrating wheel micromechanical gyroscope, and it also provides an available method to research dynamic characteristic of microstructure.