| 薄层方块电阻宽电极测试方法 |
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| 引用本文： | 吴文雪,邢杨,范志新.薄层方块电阻宽电极测试方法[J].现代显示,2009,20(6):39-40. |
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| 作者姓名： | 吴文雪 邢杨 范志新 |
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| 作者单位： | 河北工业大学应用物理系,天津,300401 |
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| 摘 要： | 设计一种用宽电极测试薄层方块电阻的方法，给出理论分析和实验结果，该方法可以作为对四探针方块电阻测试仪进行校对的原始方法．也可以开发为一个大学物理设计性实验。
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| 关 键 词： | 方块电阻 氧化铟锡 电极 测试方法 |
| 收稿时间： | 2009/3/12 |
Measurement of Sheet Resistance with Wide Electrode |
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| WU Wen-xue,XING Yang,FAN Zhi-xin.Measurement of Sheet Resistance with Wide Electrode[J].Advanced Display,2009,20(6):39-40. |
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| Authors: | WU Wen-xue XING Yang FAN Zhi-xin |
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| Affiliation: | (Department of Applied Physics, Hebei University of Technology, Tianjin 300400, China) |
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| Abstract: | A method for testing sheet resistance with the wide electrode is designed，the principle analysis and the experimental results are given．This method can be used as to proofread and correct the sheet resistance tester in the original way，and it also can develop to a designed-experiment in college physics |
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| Keywords: | sheet resistance ITO electrode measurement |
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