基于MEMS工艺的微起爆器性能研究

针对MEMS火工品低能化、集成化技术要求,设计了一种基于MEMS工艺的微起爆器,通过仿真计算获得了基体材料、换能元材料、火工药剂与微起爆器起爆性能的影响规律,确定了微起爆器的结构参数;通过MEMS工艺完成微起爆器一体化集成制作,对结构参数以及起爆性能进行了测试,结果表明结构尺寸与设计尺寸误差小于6%;微起爆器发火电压小于3V,装药直径1mm、装药量2.0mg时,可以可靠起爆CL-20炸药,实现了低能化、集成化的要求,为MEMS火工品提供技术支撑。

Research on Performance of Micro-detonator Based on MEMS Technology

Aiming at the requirements of low energy and integrated technology of MEMS pyrotechnics, a micro-detonator was designed. The influence of matrix materials, transducer materials and pyrotechnics on the detonation performance of micro-detonator was obtained through simulation, and the structural parameters of the micro-detonator were determined. The micro-detonator was integrated by MEMS process and the performance test was carried out. The results show the structure size is consistent with the design size, and the error is less than 6%. The critical ignition voltage of the micro-detonator is less than 3 V, under the critical charge diameter of 1 mm and charge mass of 2.0 mg, the micro-detonator can initiate CL-20 reliably. It provides technical support for MEMS pyrotechnics to achieve the requirements of low energy and integration.