CdO - ZnO复合薄膜的光电学特性研究

采用磁控溅射技术制备了不同原子百分比的CdO - ZnO复合薄膜,并利用X射线衍射仪、扫描电子显微镜、紫外可见近红外分光光度计、四探针电阻测试仪研究了薄膜的结构和光电学特性.研究表明:适量增加CdO掺杂量可提高薄膜在近红外区域的透射率; CdO - ZnO复合薄膜的光学带隙和电阻率随CdO含量的增加而减小,且当CdO和ZnO的原子百分比为4:1时薄膜的带隙和电阻率分别为2.09 eV和10.79×10^-3 Ω·cm.该研究结果可为制备高导电性和高透过率的薄膜提供参考.

Optical and electrical properties of CdO - ZnO composite films

Using radio frequency(RF)magnetron sputtering technology, CdO - ZnO composite films were prepared with different atomic percentages. The influences of different atomic percentages on structural, morphological and optical properties of CdO - ZnO composite films were discussed in detail by X - ray diffraction. The structure and photoelectric properties of the film was investigated scanning electron microscopy and ultraviolet visible near - infrared spectrophotometer, respectively. The results show that increasing the amount of CdO doping appropriately can increase the transmittance of the film in the near - infrared region; the optical band gap value of CdO - ZnO composite film decreases with the increase of the CdO content, and when the atomic percentage of CdO and ZnO is 4:1, the band gap and resistivity of the film are 2.09 eV and 10.79×10^-3 Ω·cm, respectively. The research results can provide reference for the preparation of high conductivity and high transmittance films.