MEMS加工误差对圆环形与多边形多环陀螺 结构对称性的影响研究

基于前期实验结果,为了进一步研究MEMS加工误差对多边形与圆环形多环陀螺结构加工后结构对称性的影响,作为对比,基于相同的结构设计原则,分别设计了2组不同结构半径与环数的圆环形与多边形多环结构,并在同一晶圆上完成了2组结构的MEMS工艺加工。搭建了多环陀螺参数测试系统对结构频差进行测试,测试结果表明,2组实验中多边形结构的频差均明显优于圆环形结构,且结构半径更大、环数更多的一组频差对比更加显著,表明MEMS加工误差对多边形结构的影响较小,意味着直线形几何结构比曲线形几何结构对MEMS工艺加工误差具有更高的容忍度。该实验结果对于所有需要高结构对称性的谐振结构设计具有指导意义。

Influence of MEMS Machining Errors on Structural Symmetry of Ring-like and Cobweb-like Disk Resonate Gyroscopes

Based on the previous experimental results,in order to further study the influence of MEMS machining errors on the structural symmetry of ring-like and cobweb-like disk resonate gyroscopes(DRGs),two sets of DRG structures with different radii and ring numbers were designed based on the same design principle.The two sets of ring-like and cobweb-like structures were fabricated on the same wafer using MEMS processing technology.A DRG parameter test system was built to test the frequency split of the DRG structures.The results show that the frequency split of the cobweb-like structure in both sets of experiments is significantly better than that of ring-like structure,and the frequency split comparison of the set with bigger structure radius and more rings is more significant,indicating that the MEMS machining error has less influence on the cobweb-like structures,which means that the linear geometry has a higher tolerance for the MEMS machining error than the curved geometry.The experimental results are instructive for the design of all resonant structures that require high structural symmetry.