| 微系统技术（连载六）─性能与测试 |
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| 引用本文： | 张光照. 微系统技术（连载六）─性能与测试[J]. 传感器与微系统, 1996, 0(3) |
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| 作者姓名： | 张光照 |
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| 作者单位： | 东北传感技术研究所 |
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| 摘 要： | 简要介绍了利用新型干涉仪测量微机械零件表面粗糙度的原理和方法，加载结构动摩擦系数测量，微系统器件残余应力分析和半导体器件表面电位测量。
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| 关 键 词： | 干涉仪，动摩擦系数，残余应力分析，表面电位 |
Microsystem Technologies(Serials Six) -Characterization and Testing |
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| Zhang Guangzhao. Microsystem Technologies(Serials Six) -Characterization and Testing[J]. Transducer and Microsystem Technology, 1996, 0(3) |
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| Authors: | Zhang Guangzhao |
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| Affiliation: | Northeast China Research Institute of Transduction Technology |
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| Abstract: | The principle and method of the new interferometer for measuring surface profiling of optically rough surfaces of micro mechanical components,measurements of the kinetic coefficient of friction for structures under loads,residual stress analysis in components of microsystems and the measurements of sur face potential for semiconductors are brifly described. |
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| Keywords: | Interferometer Kinetic friction coefficient Residual stress analysis Surface potential |
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