A novel tribometer for the measurement of friction in MEMS |
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| Authors: | I.S.Y. Ku T. Reddyhoff J.H. Choo A.S. Holmes H.A. Spikes |
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| Affiliation: | 1. Department of Mechanical Engineering, Imperial College London, London SW7 2AZ, UK;2. Department of Electrical and Electronic Engineering, Imperial College London, London SW7 2AZ, UK;1. V-Research GmbH, 6850 Dornbirn, Austria;2. University of Applied Sciences NTB, 9471 Buchs SG, Switzerland;3. University of Dortmund, 44227 Dortmund, Germany;1. Department of Machine Design, KTH Royal Institute of Technology, Sweden;2. Brembo S.p.a. Italy;1. Department of Civil, Architectural and Environmental Engineering, Missouri University of Science and Technology, Rolla, MO, United States;2. Department of Civil Engineering, Université de Sherbrooke, QC, Canada;1. Department of Civil, Architectural and Environmental Engineering, Missouri University of Science and Technology, Rolla, MO, United States;2. Department of Civil Engineering, Université de Sherbrooke, QC, Canada;1. IETCC-CSIC, C/Serrano Galvache 4, Madrid 28033, Spain;2. IK4-Tekniker, Calle Inaki Goenaga 5, Eibar 20600, Spain;3. ICMM-CSIC, C/Sor Juana Inés de la Cruz 3, Madrid 28049, Spain |
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| Abstract: | A new tribometer has been developed to determine friction under conditions that are representative of MEMS (micro-electro-mechanical-systems). The tribometer consists of a rotating silicon disc, loaded against a stationary silicon disc. Friction and film thickness values are measured using laser displacement techniques. In this study, two different test set-ups were used: a flat on flat specimen geometry, and a moving flat against a structured surface, similar to that of a miniature thrust pad bearing. Using this tribometer, hydrodynamic tests have been carried out with the specimens fully submerged in hydrocarbon lubricants. Results suggest that friction increases with sliding speed and decreases with increasing applied normal load, which is in accordance with the hydrodynamic theory. |
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