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Gas sensing properties of nanocrystalline diamond films |
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| Authors: | Alexander Kromka Marina Davydova Bohuslav Rezek Milan Vanecek Martin Stuchlik Petr Exnar Martin Kalbac |
| Affiliation: | 1. Institute of Physics, Academy of Sciences of the Czech Republic, Prague, Czech Republic;2. Department of Physics, Faculty of Civil Engineering CTU in Prague, Prague, Czech Republic;3. Department of Environment Protection, University of Pardubice, Pardubice, Czech Republic;4. Department of Chemistry, TU Liberec, Liberec, Czech Republic;5. J. Heyrovsky Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, Prague, Czech Republic |
| Abstract: | Toxic gas sensing device with metal electrodes built into nanocrystalline diamond (NCD) is investigated. The NCD morphology is controlled via seeding and/or deposition time. The surface properties and morphology of NCD are studied using scanning electron microscopy (SEM) and atomic force microscopy (AFM). AFM measurements reveal increase in NCD surface area by up to 13%. Gas sensing properties of H-terminated NCD device show high sensitivity towards oxidizing species where the surface conductivity is increased by an order of magnitude for humid air and by three orders of magnitude for COCl2. The surface conductivity exhibits a small decrease to reducing spices (CO2, NH3). |
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