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Feasibility study on cubic boron nitride coated glass press molds
Authors:Kungen Teii  Seiichiro Matsumoto
Affiliation:1. Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan;2. Exploratory Materials Research Laboratory for Energy and Environment, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan;3. Ceramic Forum Co. Ltd., 1-6-6 Taitoh, Taitoh-ku, Tokyo 110-0016, Japan
Abstract:We report the feasibility of glass press molds using high-quality, thick cubic boron nitride (cBN) films prepared in a plasma jet by chemical vapor deposition. A press test using a cBN film for an optical glass is carried out at a high temperature (≥ 650 °C), above the glass transition temperature. Surface morphology, chemical composition, and optical transparency of the glass after a press test are examined by atomic force microscopy, X-ray photoelectron spectroscopy, energy dispersion X-ray spectroscopy, and ultraviolet-visible-near-infrared (UV-VIS-near-IR) and IR spectroscopy. The B and N concentrations at the top several nanometers of the glass increase by several at.% after a press test. This is attributed to diffusion of B and N from the film into the glass. The UV-VIS-near-IR transparency of the glass in a short wavelength range (≤ 900 nm) decreases by several % due to light scattering at the roughened glass surface. In contrast, the IR transparency of the glass remains constant despite an increase in the surface roughness.
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