Mechanical and tribological properties of boron,nitrogen-coincorporated diamond-like carbon films prepared by reactive radio-frequency magnetron sputtering |
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Authors: | H. Nakazawa A. Sudoh M. Suemitsu K. Yasui T. Itoh T. Endoh Y. Narita M. Mashita |
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Affiliation: | 1. Hirosaki University, Hirosaki, Aomori 036-8561, Japan;2. Research Institute of Electrical Communication, Tohoku University, Sendai 980-8577, Japan;3. Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan;4. Center of Interdisciplinary Research, Tohoku University, Sendai 980-8578, Japan;5. Yamagata University, Yonezawa,Yamagata 992-8510, Japan |
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Abstract: | We have deposited boron- and/or nitrogen-incorporated DLC films by radio-frequency magnetron sputtering, and systematically investigated the structure and the mechanical and tribological properties. The N content in DLC films increased with increasing N2 flow ratio [N2/(Ar + N2)], and it tended to be saturated at higher N2 flow ratios. The N content further increased with an increase in the B content of the targets. The B/C ratios of the films were almost the same as those of the B-containing targets regardless of the N content. Scratch tests revealed that the adhesion strength of N-incorporated DLC films decreased with increasing N2 flow ratio and the critical loads of B-incorporated films were lower than that of an unincorporated film. It was found that for B, N-coincorporated films there was an optimum N2 flow ratio at which the critical load became a maximum value, which was higher than that of the unincorporated film. The optimum N2 flow ratio increased with an increase in the B composition of the targets. The N-incorporated films peeled off during ball-on-plate friction tests. On the other hand, the B, N-coincorporated films showed good wear-resistant properties that the specific wear rates were lower than those of the unincorporated and B-incorporated films. |
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