Comparison of different oxidation techniques on single-crystal and nanocrystalline diamond surfaces |
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| Authors: | Frederik Klauser Slimane Ghodbane Rabah Boukherroub Sabine Szunerits Doris Steinmüller-Nethl Erminald Bertel Norbert Memmel |
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| Affiliation: | 1. Institute of Physical Chemistry, University of Innsbruck, Innrain 52a, A-6020 Innsbruck, Austria;2. ρ-Best coating Hartstoffbeschichtung GmbH, Exlgasse 20a, A-6020 Innsbruck, Austria;3. Institut de Recherche Interdisciplinaire (IRI, USR 3078), Parc de la Haute Borne, 50 Avenue de Halley, BP 70478, 59658 Villeneuve d''Ascq and Institut d''Electronique, de Microélectronique et de Nanotechnologie (IEMN, UMR 8520), Cité Scientifique, Avenue Poincar, BP. 60069, 59652 Villeneuve d''Ascq, France |
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| Abstract: | Various oxidation techniques (plasma-beam, sulfo-chromic acid, UV-ozone, heating in air) were applied to single-crystalline (111) and (100) diamond surfaces as well as nanocrystalline diamond (NCD) films and analyzed by X-ray photoelectron spectroscopy (XPS) with respect to oxygen content and type of carbon–oxygen groups formed upon oxidation. Due to their increased surface, NCD films show a significantly higher oxygen uptake as compared to their single-crystal counterparts. No marked differences were observed between the different oxidation techniques. For all oxidation techniques used, several carbon–oxygen groups are simultaneously present on the surface. The relative fraction of singly-oxidized carbon atoms (attributed to isolated ether or epoxy-like groups) generally decreases slightly with increasing oxygen content, but always remains the dominating species. |
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