Fabrication of micro-hole arrays using precision filled wax metal deposition |
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| Authors: | Shun-Tong Chen Tsu-Sheng Luo |
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| Affiliation: | 1. School of Materials and Metallurgy, Northeastern University, Shenyang 110819, China;2. National Key Laboratory for Remanufacturing, Academy of Armored Forces Engineering, Beijing 100072, China;3. National Engineering Research Center for Mechanical Products Remanufacturing, Academy of Armored Forces Engineering, Beijing 100072, China;1. The Department of Anesthesiology, Liaoning Cancer Hospital and Institute, Shenyang, China;2. The Department of Internal Medicine, Liaoning Cancer Hospital and Institute, Shenyang, China;3. The Department of General Surgery, Shen Zhou Hospital, Shen Yang Medical College, Shenyang, China;4. Shen Yang Emergency Center, China;5. The Department of General Surgery, The First Hospital of China Medical University, Shenyang, China;6. The Department of General Surgery, Huaxi Hospital, Si Chuan University, Chengdu, China;7. The Department of Gastric Surgery, Liaoning Cancer Hospital and Institute, Shenyang, China;1. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, People’s Republic of China;2. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, People’s Republic of China;1. Professor, Department of Mechatronic Engineering, National Taiwan Normal University, Taipei, Taiwan;2. Graduate student, Department of Mechatronic Engineering, National Taiwan Normal University, Taipei, Taiwan |
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| Abstract: | This study presents a low-cost hybrid fabrication process that produces micro-holes of less than 200 μm in diameter. First of all, a micro-EDM hole-drilling is employed to perforate micro-holes through the mirror-like substrate (SUS304), which is cylindrical in shape. The oily wax also known as “sacrificial material” is extruded and formed onto the SUS304 substrate, resulting in a precision cylindrical micro-wax pillar mould. A precision electroforming is then conducted to deposit a thick nickel metal layer onto the substrate, and subsequently the wax mould is completely removed and revealed a perforated micro-hole array after releasing from the substrate. Experimental results show that the wax mould has an excellent duplication capability. The finished micro-hole array has an average hole-diameter of 165.3 μm and demonstrates ideal geometric accuracy. The proposed approach can significantly cost down and contribute to the precision machining industry. |
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