Distributed MEMS analog phase shifter with enhanced tuning |
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Authors: | McFeetors G Okoniewski M |
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Affiliation: | Dept. of Electr. & Comput. Eng., Univ. of Calgary, Alta., Canada; |
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Abstract: | The design, fabrication, and measurement of a tunable microwave phase shifter is described. The phase shifter combines two techniques: a distributed capacitance transmission line phase shifter, and a large tuning range radio frequency (RF) microelectromechanical system (MEMS) capacitor. The resulting device is a large bandwidth, continuously tunable, low-loss phase shifter, with state-of-the-art performance. Measurements indicate analog tuning of 170/spl deg/ phase shift per dB loss is possible at 40 GHz, with a 538/spl deg/ phase shift per centimeter. The structure is realized with high-Q MEMS varactors, capable of tuning C/sub max//C/sub min/= 3.4. To our knowledge, this presents the lowest loss analog millimeter wave phase shifter performance to date. |
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