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Particle Deposition and Removal of Relevance to Wet Processing in Semiconductor Manufacturing |
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| Authors: | Chieh-Chun Chiang Bing Wu Srini Raghavan |
| Affiliation: | 1. Department of Materials Science and Engineering, University of Arizona, Tucson, AZ, USAchwen6411@email.arizona.edu;3. Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ, USA;4. Department of Materials Science and Engineering, University of Arizona, Tucson, AZ, USA;5. Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ, USA |
| Abstract: | |
| Keywords: | megasonic cleaning particle deposition particle removal wet processing of wafers |