Development of XY scanner with minimized coupling motions for high-speed atomic force microscope |
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| Authors: | PARK Jong-kyu MOON Won-kyu |
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| Affiliation: | PARK Jong-kyu1,MOON Won-kyu2 1.Department of Mechanical Engineering,Changwon National University,Changwon,641-773,Korea,2.Department of Mechanical Engineering,Pohang Univer sity of Science and Technology,Pohang,790-784 |
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| Abstract: | The design and fabrication processes of a novel scanner withminimized coupling motions for a high-speed atomic force microscope (AFM) were addressed.An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program,Recurdyn.Because the scanning speed of each direction may differ,the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes,with one dominan... |
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| Keywords: | atomic force microscope scanner piezoelectric stack actuator crosstalk flexure hinge |
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