硼掺杂DLC薄膜在海水环境中的腐蚀磨损性能

目的 研究硼（B）掺杂对类金刚石（DLC）薄膜在人工海水介质中耐腐蚀性能和摩擦磨损性能的影响。方法 利用非平衡磁控溅射的方法，通过控制碳化硼靶材和石墨靶材电流，在304不锈钢基底表面沉积了一种无掺杂DLC薄膜和两种不同B含量的DLC薄膜（B的原子数分数分别为7.23%、13.27%）。采用扫描电子显微镜、拉曼光谱仪、纳米压痕仪、划痕仪、摩擦实验机对薄膜的化学成分、显微结构、纳米硬度、结合力及摩擦性能进行研究。通过测试薄膜在人工海水介质中的静态极化曲线和交流阻抗谱以及监测薄膜在摩擦前后和摩擦过程中的开路电位变化，来研究薄膜在人工海水中的摩擦学和耐腐蚀性能。结果 与未掺杂的DLC薄膜相比，掺杂B原子数分数为7.23%的DLC薄膜的硬度和弹性模量变化不明显，但ID/IG增大，与基底的结合力增大到36 N（无掺杂DLC薄膜为20 N），自腐蚀电位升高，自腐蚀电流密度减小，极化电阻增大，并且在人工海水介质中的摩擦系数降低了10.7%，磨损量降低了37.0%，开路电位大幅升高。掺杂B原子数分数为13.27%的DLC薄膜的摩擦学及耐蚀性能则大幅度下降。结论 在DLC薄膜中掺杂适量的B有助于提高DLC薄膜在人工海水介质中的耐腐蚀性能和磨蚀性能。

Corrosive Wear Properties of Boron-doped Diamond-like Carbon Films in Seawater Environment

The work aims to investigate the effect of boron dopant on the corrosion resistance and friction and wear properties of diamond-like carbon (DLC) films in artificial seawater. An undoped DLC film and two boron-doped DLC films with the content of B element of 7.23% and 13.27% were deposited on the surface of 304 stainless steel substrate by unbalanced magnetron sputtering through controlling current of boron carbide and graphite targets. Scanning electron microscopy, Raman spectroscopy, nanoindentation tester, scratch tester and ball-on-disk tribometer were used to test the chemical composition, microstructure, nanohardness, adhesion and friction properties of films, respectively. The friction and corrosion resistance of films in artificial seawater medium was studied by testing the static polarization and electrochemical impedance spectroscopy and measuring the changes in open circuit potential of films before, during and after sliding process. Compared to undoped DLC film, there was less change in hardness and elastic modulus of boron-doped DLC film with B content of 7.23%. However, ID/IG ratio of doped DLC film increased, adhesion with substrate increased from 20 N to 36 N, corrosion potential increased, corrosion current density decreased, polarization resistance increased and tribocorrosion properties in the artificial seawater medium deceased by 10.7%, wear reduced by 37.0% and potential of open circuit increased dramatically. The tribocorrosion properties and corrosion resistance of DLC film with doped boron content of 13.27% decreased significantly. Doping appropriate amount of B into DLC film is helpful to improve the corrosion resistance and abrasion resistance of DLC film in artificial seawater medium.