基于电荷驱动的多通道压电变形镜电源设计

压电变形镜具有频率响应高,变形量大,稳定性好等优点,已广泛应用于自适应光学领域,但因在电压驱动方式下压电材料迟滞特性较大,使压电变形镜的精确控制难。为降低压电变形镜的迟滞影响,设计了一种基于电荷驱动的多通道压电变形镜驱动电源,介绍了驱动电源的构成及原理,并搭建了一套基于夏克哈特曼波前传感器的自适应光学测试平台来验证驱动电源的性能。实验结果表明,该驱动电源可有效降低压电变形镜的迟滞效应,整体迟滞约1%,镜面变形的分辨率均方根误差(RMS)值约1.1 nm,能够满足在自适应光学领域对多通道压电变形镜精确控制的要求。

Design of Power Supply of Charge Driven Multi channel Piezoelectric Deformable Mirror

The piezoelectric deformable mirror (DM) has been widely used in the field of adaptive optics with the advantages of high frequency response, large deformation and good stability. However, the precise control of the piezoelectric DM is difficult due to the large hysteresis of piezoelectric materials under voltage driven mode. In order to reduce the hysteresis effect of the piezoelectric DM, a driving power supply for the multi channel piezoelectric DM based on the charge driving is designed in this paper. The composition and principle of the driving power supply are introduced, and an adaptive optical test platform based on the Shack Hartmann wavefront sensor is built to verify the performance of the driving power supply. The experimental results show that the driving power supply can effectively reduce the hysteresis effect of piezoelectric deformable mirror. The overall hysteresis is about 1% and the root mean square (RMS) error value of resolution of the DM deformation is about 1.1 nm. It can satisfy the requirements of precise control of multi channel piezoelectric deformable mirror in the field of adaptive optics.