| 面向扑翼微飞行器的扭矩传感器研究 |
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| 引用本文： | 周靖,张卫平,邹阳,王晨阳,孟冉,靖霄.面向扑翼微飞行器的扭矩传感器研究[J].半导体光电,2019,40(3):355-359. |
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| 作者姓名： | 周靖 张卫平 邹阳 王晨阳 孟冉 靖霄 |
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| 作者单位： | 上海交通大学电子信息与电气工程学院微纳电子学系微米/纳米加工技术重点实验室薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240;上海交通大学电子信息与电气工程学院微纳电子学系微米/纳米加工技术重点实验室薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240;上海交通大学电子信息与电气工程学院微纳电子学系微米/纳米加工技术重点实验室薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240;上海交通大学电子信息与电气工程学院微纳电子学系微米/纳米加工技术重点实验室薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240;上海交通大学电子信息与电气工程学院微纳电子学系微米/纳米加工技术重点实验室薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240;上海交通大学电子信息与电气工程学院微纳电子学系微米/纳米加工技术重点实验室薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240 |
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| 基金项目： | 预研项目(LZY2016215, LZY2017206,1, 17070107,4); 教育部新世纪优秀人才支持计划项目(NCET-10-0583); 教育部支撑项目(6141A02022607,6141A020226); 上海专业技术服务平台项目(16DZ2290103)；创新特区项目(18-163-11-2T-005-020-01). |
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| 摘 要： | 由于仿昆虫扑翼微飞行器需要在小范围内传输扭矩,且扭矩数值较小,一般的扭矩传感器或力传感器在其动态范围内均难以达到测量精度的要求。为了解决这一问题,提出了一种新型单轴扭矩传感器的设计方案,并完成了实际的制造和测试。该扭矩传感器的主体为殷钢材料,由激光加工制作而成,利用电容式位移传感器测量主轴旋转时目标板的位移,从而建立输出电压与施加扭矩之间的对应关系。传感器带宽和分辨率与微飞行器飞行实验的标准相匹配,同时对离轴负载保持不敏感。经实验测定,该单轴扭矩传感器的带宽为1.1kHz,测量范围为±260.8μNm,分辨率为0.013μNm,可以满足微飞行器扭矩的测量需求。
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| 关 键 词： | 微飞行器 单轴扭矩传感器 敏感元件 测试范围 分辨率 |
| 收稿时间： | 2018/11/17 0:00:00 |
Research on Torque Sensor for Flapping Wing Micro Aircraft |
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| ZHOU Jing,ZHANG Weiping,ZOU Yang,WANG Chenyang,MENG Ran and JING Xiao.Research on Torque Sensor for Flapping Wing Micro Aircraft[J].Semiconductor Optoelectronics,2019,40(3):355-359. |
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| Authors: | ZHOU Jing ZHANG Weiping ZOU Yang WANG Chenyang MENG Ran and JING Xiao |
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| Affiliation: | Shanghai Key Lab. of Beidou Navigation and Location-based Services, Lab. for Thin Film and Micro Fabrication of The Ministry of Education, National Key Lab. of Science and Technol. on Micro/Nano Fabrication Lab., Dept. of Micro-Nano Electronics, School of Electronic Information and Electrical Engin., Shanghai Jiaotong University, Shanghai 200240, CHN,Shanghai Key Lab. of Beidou Navigation and Location-based Services, Lab. for Thin Film and Micro Fabrication of The Ministry of Education, National Key Lab. of Science and Technol. on Micro/Nano Fabrication Lab., Dept. of Micro-Nano Electronics, School of Electronic Information and Electrical Engin., Shanghai Jiaotong University, Shanghai 200240, CHN,Shanghai Key Lab. of Beidou Navigation and Location-based Services, Lab. for Thin Film and Micro Fabrication of The Ministry of Education, National Key Lab. of Science and Technol. on Micro/Nano Fabrication Lab., Dept. of Micro-Nano Electronics, School of Electronic Information and Electrical Engin., Shanghai Jiaotong University, Shanghai 200240, CHN,Shanghai Key Lab. of Beidou Navigation and Location-based Services, Lab. for Thin Film and Micro Fabrication of The Ministry of Education, National Key Lab. of Science and Technol. on Micro/Nano Fabrication Lab., Dept. of Micro-Nano Electronics, School of Electronic Information and Electrical Engin., Shanghai Jiaotong University, Shanghai 200240, CHN,Shanghai Key Lab. of Beidou Navigation and Location-based Services, Lab. for Thin Film and Micro Fabrication of The Ministry of Education, National Key Lab. of Science and Technol. on Micro/Nano Fabrication Lab., Dept. of Micro-Nano Electronics, School of Electronic Information and Electrical Engin., Shanghai Jiaotong University, Shanghai 200240, CHN and Shanghai Key Lab. of Beidou Navigation and Location-based Services, Lab. for Thin Film and Micro Fabrication of The Ministry of Education, National Key Lab. of Science and Technol. on Micro/Nano Fabrication Lab., Dept. of Micro-Nano Electronics, School of Electronic Information and Electrical Engin., Shanghai Jiaotong University, Shanghai 200240, CHN |
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| Abstract: | |
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| Keywords: | micro-aircraft single-axis torque sensor sensitive components test range resolution |
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