激光散斑测位移实验中参数的分析与模拟

对激光散斑测定位移实验中的相关参数进行了分析,针对不同散斑特征尺寸对应的二次曝光散斑图的逐点再现过程进行了详细的计算机模拟。模拟结果显示,同一散斑图错开散斑平均尺寸的1～6倍距离叠加,在满足菲涅耳近似条件的衍射距离下用细激光束逐点再现,可得到理想的干涉条纹。

Analysis and Simulation on Parameters of Displacement Measurement by Laser Speckle

Parameters related with displacement measurement using laser speckle were analyzed and computer simulations were carried out on the point-by-point redisplay of double-exposure exposure specklegram of various average speckle size. The results show that, high contrast interference fringes can be obtained when the same specklegram overlays with the distance of 1 to 6 times of the same average size, and is redisplayed with the laser beam at the diffraction distance metting Fresnel approximation.