| 改进型二维位置敏感探测器检测误差的校正 |
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| 引用本文： | 邱自学,袁江,毛建. 改进型二维位置敏感探测器检测误差的校正[J]. 传感器与微系统, 2006, 25(8): 66-68 |
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| 作者姓名： | 邱自学 袁江 毛建 |
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| 作者单位： | 1. 南通大学,机械工程学院,江苏,南通,226007
2. 南通海立电子有限公司,江苏,南通,226361 |
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| 基金项目： | 江苏省南通市科技创新项目 |
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| 摘 要： | 分析了改进表面分流型二维位置敏感探测器(PSD)的工作原理及信号调理电路,针对PSD位置检测误差大的缺点,设计了利用万能工具显微镜进行标定的实验系统,运用误差理论对传感器在A区和B区的X向及Y向位置测试数据进行了校正。实验结果表明:应用这种校正方法,可减少PSD的位置检测误差,其中,A区位置检测误差可减少到±0.02mm。
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| 关 键 词： | 位置敏感探测器 位置检测误差 标定 |
| 文章编号： | 1000-9787（2006）08-0066-03 |
| 收稿时间： | 2006-03-22 |
| 修稿时间： | 2006-03-22 |
Calibration of position detecting error for improved 2-dimensional position sensitive detector |
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| QIU Zi-xue,YUAN Jiang,MAO Jian. Calibration of position detecting error for improved 2-dimensional position sensitive detector[J]. Transducer and Microsystem Technology, 2006, 25(8): 66-68 |
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| Authors: | QIU Zi-xue YUAN Jiang MAO Jian |
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| Abstract: | The principle and a signal conditioning circuit of tetra-lateral 2-dimensional position sensitive detector(PSD) are analyzed.The experimental calibration system is built in a multipurpose instrument microscope for reducing the position detecting error of this sensor.Based on the error theory,the measuring datum in direction X and Y of the PSD are calibrated in separately area A and B.Experimental results show that the position detection error of the PSD can be reduced by using this method,and the position detection error in area A is no more than(±0.02 mm). |
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| Keywords: | position sensitive detector(PSD) position detecting error calibration |
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