| CVD金刚石在电真空器件中的应用 |
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| 引用本文： | 李新宇,郭辉,刘征,高陇桥.CVD金刚石在电真空器件中的应用[J].真空电子技术,2009(4):27-31,35. |
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| 作者姓名： | 李新宇 郭辉 刘征 高陇桥 |
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| 作者单位： | 1. 北京真空电子技术研究所,北京,100016
2. 河北激光研究所,河北,石家庄,050081 |
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| 摘 要： | 介绍了化学气相沉积（CVD）金刚石膜应用于电真空器件夹持杆及输能窗方面的研究进展，和国外对CVD金刚石封接的几种技术解决方案以及国内CVD金刚石膜金属化及封接方面的研究情况。
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| 关 键 词： | CVD金刚石膜 电真空器件 封接 |
Applications of CVD Diamond Film to Vacuum Electronic Devices |
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| LI Xin-yu,Guo Hui,LIU Zheng,GAO Long-qiao.Applications of CVD Diamond Film to Vacuum Electronic Devices[J].Vacuum Electronics,2009(4):27-31,35. |
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| Authors: | LI Xin-yu Guo Hui LIU Zheng GAO Long-qiao |
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| Affiliation: | LI Xin-yu,Guo Hui ,LIU Zheng,GAO Long -qiao(1. Beijing Vacuum Electronics Research Institute, Beijing 100016, China; 2. Institute of Hebei Laser Technology, Shijiazhuang 050081, China) |
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| Abstract: | The research progress on applications of CVD diamond film to the support rod and output window of vacuum electronic devices were described in this paper. Different CVD diamond sealing process which used by foreign companies were introduced. The domestic research development on CVD diamond film metallization and sealing were discussed. |
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| Keywords: | Chemical vapor deposition diamond film Vacuum electronic device Seal |
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