一步激光直写制作透射式相位光栅

利用一步激光直写灰阶光刻方法制作了具有连续浮雕结构的透射式相位光栅.原子力显微镜测量结果表明制作的透射式相位光栅具有连续外形轮廓、理想的周期和深度.飞秒激光实验系统测量的光栅的衍射效率结果表明:最大衍射角效率为66.8%、零级能量仅为入射光能量的3.3%,这在光限幅中有重要应用价值.

Fabrication of transmission phase gratings by one step direct laser writing

Transmission phase gratings with continuous relief structures are fabricated with one step direct laser writing grayscale photolithography.The measurement results with atomic force microscope(AFM) indicate that the proposed gratings have nice profile,accurate period and proper depth.The diffraction efficiencies of the fabricated phase gratings are measured with a femto-second laser optical testing system.The maximum diffraction efficiency is 66.8% and only 3.3% of the input energy remains in zero order,whic...