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| 硅单晶中氮－氧复合体的红外吸收研究 | |
| 引用本文： | 杨德仁,阙端麟.硅单晶中氮－氧复合体的红外吸收研究[J].红外与毫米波学报,1995,14(6). |
| 作者姓名： | 杨德仁 阙端麟 |
| 作者单位： | 浙江大学硅材料国家重点实验室 |
| 摘 要： | 对不同条件下含氮和不含氮的硅单晶，在３００Ｋ和８Ｋ下进行红外吸收研究．实验结果表明：含氮硅单晶和氮一氧复合体相关的红外吸收峰为１０３０ｃｍ－１，１０００ｃｍ－１和８０６ｃｍ－１． |
| 关 键 词： | 硅，氮－氧复合体，红外吸收 |
INFRARED ABSORPTION STUDY OF NITROGEN-OXYGEN COMPLEX IN SILICON |
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| Yang Deren,Qne Duanlin.INFRARED ABSORPTION STUDY OF NITROGEN-OXYGEN COMPLEX IN SILICON[J].Journal of Infrared and Millimeter Waves,1995,14(6). | |
| Authors: | Yang Deren Qne Duanlin |
| Abstract: | The N-doped and N-undoped single crystal silicon under different conditions was investigated by means of Fourier Transfosm Infrared Spectroscope (FTIR) at room temperature (300K) and low temperature (SK). The experiments pointed out that the 1030cm-1, 1000cm-1 and 806cm-1 optical absorption lines are related to the nitrogenoxygen complex in nitrogen-doped CZ silicon. |
| Keywords: | silicon nitrogen-oxygen complex infrared absorption The project supported by the National Natural Science Foundation of China |
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