压阻式传感器温度补偿中几种数值分析方法的应用比较

半导体压阻传感器材料温度系数较大,较小的温度变化会对传感器性能产生较大的影响,因此需要对温度进行补偿。首先分析了压阻材料受力时输出随温度变化函数,并且通过比较不同的数值分析方法,研究在不同条件,不同精度要求情况下,几种数值分析方法各自优劣,为实际应用中使用拟合曲线对压阻传感器进行温度补偿提供一定参考。

Comparison of Several numerical analysis method application for Piezoresistive sensor temperature compensation

For the temperature coefficients of semiconductor piezoresistive sensors are rather large and the performance of the sensors will be influenced by small change of temperature evidently. It is obliged to make temperature compensation. In this paper, the output function varies with temperature when the piezoresistive materials are stressed is firstly analyzed. In addition, by comparing different numerical analysis methods, the advantages and disadvantages of the numerical analysis methods under different conditions and different accuracy requirements are studied to temperature compensation of pro the vide a reference for the piezoresistive sensor by using the fitting curve in practical applications.