| 微型溅射离子泵性能测试 |
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| 引用本文： | 梅国强,齐京,陈旭,朱秀珍. 微型溅射离子泵性能测试[J]. 真空科学与技术学报, 2005, 25(6): 449-453 |
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| 作者姓名： | 梅国强 齐京 陈旭 朱秀珍 |
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| 作者单位： | 清华大学电子工程系,北京,100084 |
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| 摘 要： | 本文介绍了小抽速微型溅射离子泵的性能测试系统和参考机械行业标准确定的测试方法,探讨了测量结果误差来源.实验测试了微型溅射离子泵的各项性能指标,为进一步研制提供了依据.
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| 关 键 词： | 微型溅射离子泵 性能测试 动态流导法 |
| 文章编号： | 1672-7126（2005）06-0449-05 |
| 收稿时间： | 2005-05-07 |
| 修稿时间： | 2005-05-07 |
Experimental Evaluation of Miniature Sputtering Ion Pump |
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| Mei Guoqiang,Qi Jing,Chen Xu,Zhu Xiuzhen. Experimental Evaluation of Miniature Sputtering Ion Pump[J]. JOurnal of Vacuum Science and Technology, 2005, 25(6): 449-453 |
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| Authors: | Mei Guoqiang Qi Jing Chen Xu Zhu Xiuzhen |
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| Affiliation: | Department of Electronic Engineering,Tsinghua Universtiy,Beijing,100084,China |
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| Abstract: | The testing technique and system of the newly developed,miniaturized sputtering ion pump with low pumping speed has been developed in accordance with the standards formulated by machine industry.Possible sources of measurement error were analyzed,and the technical specifications of the pump were experimentally evaluated. |
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| Keywords: | Miniature sputtering ion pump Experimental evaluation Orifice flow dynamic method |
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