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Full-Band Monte Carlo Simulation of Two-Dimensional Electron Gas in SOI MOSFETs
Authors:H. Takeda  N. Mori  C. Hamaguchi
Affiliation:(1) Department of Electronic Engineering, Osaka University, 2–1 Yamada-oka, Suita City, Osaka, 565-0871, Japan
Abstract:A full-band Monte Carlo simulation of two-dimensional electron gas is performed to study effects of the non-parabolicity of the energy band structure on the phonon-limited electron mobility in SOI MOSFETs with a thin Si-layer.
Keywords:SOI MOSFET  pseudo-potential method  energy band structure  Monte Carlo simulation
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