| 微观摩擦与表面形貌相关性的试验研究 |
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| 引用本文： | 董云开,刘莹,温诗铸. 微观摩擦与表面形貌相关性的试验研究[J]. 中国机械工程, 2005, 16(6): 542-545 |
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| 作者姓名： | 董云开 刘莹 温诗铸 |
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| 作者单位： | 1. 清华大学摩擦学国家重点实验室,北京,100084
2. 南昌大学,南昌,330029 |
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| 基金项目： | 国家自然科学基金资助项目(50135040,50275071) |
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| 摘 要： | 针对微机电系统存在的问题，阐述了微摩擦的测试方法以及表面形貌对微机械中摩擦性能的影响，试验研究了表面形貌对介于宏观和微观之间摩擦行为的影响。试验用研磨的方法在硅片表面制作了不同宽度的条纹，通过UMT微摩擦测试仪研究了在不同速度和载荷下氮化硅陶瓷球和试样间的摩擦行为。试验表明，在硅片上制作出合适的条纹有助于降低摩擦系数，在低载低速下出现了测力梁突然释放弹性变形能的情况，使得摩擦力和载荷不稳定，而且随着表面条纹间距增大，这种现象的频率也越来越高，并通过理论分析解释了这些现象。
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| 关 键 词： | 微机械 微摩擦 表面形貌 弹性变形 |
| 文章编号： | 1004-132X(2005)06-0542-04 |
Experimental Study on Relation between Micro Friction and Surface Topography |
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| Dong Yunkai,Liu Ying,Wen Shizhu. Experimental Study on Relation between Micro Friction and Surface Topography[J]. China Mechanical Engineering, 2005, 16(6): 542-545 |
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| Authors: | Dong Yunkai Liu Ying Wen Shizhu |
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| Affiliation: | Dong Yunkai1 Liu Ying2 Wen Shizhu1 1. State Key Laboratory of Tribology,Tsinghua University,Beijing,100084 2. Nanchang University,Nanchang,330029 |
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| Abstract: | Based on the existing problems in MEMS, measurement methods of micro-friction and the impacts of surface topography on friction performance in micro machine were reviewed. With simple experiments, the influence of surface topography on friction behavior in the meso-scale was analyzed. Specimens with different striated surfaces were fabricated on silicon wafers by coated abrasive machining. The frictional behaviors among these specimens and silicon nitride ball at different velocity and load levels were observed by CETR Micro-Tribometer. It is found that suitable striated surface can reduce the coefficient of friction. Also, the phenomenon of elastic energy release of beam can be observed in the situation of low velocity and low load, which occurred more frequently with larger striation and resulted in the unsteadiness of friction and load. Finally, this phenomenon was theoretically analyzed. |
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| Keywords: | micro machine micro friction surface topography elastic deformation |
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