悬臂梁阀单腔压电泵设计方法研究

给出了悬臂梁阀单腔压电泵的理论分析,根据压电振子与流体耦合的理论,建立了压电泵系统的动态模型.分析了流体质量、输出压力和系统阻尼对压电泵最佳工作频率的影响,认为减小腔体高度可以提高压电泵的最佳工作频率,提高压电泵的稳定性.通过分析压电振子结构参数对变形量的影响规律,确定了振子的最佳结构参数,认为压电陶瓷层与金属基板厚度比取0.45～0.55,直径比取0.8～0.9最佳.研究了压电泵出流形式对压电泵输出能力的影响,认为轴後向出流有利于提高压电泵的输出能力.

Investigation on design method of single chamber piezoelectric pump with cantilever valve

Based on hydro-solid coupling theory, the cantilever valve piezoelectic pump was comprehensively analyzed, and its dynamic model was established. After analysis of the interactions between hydro-mass, output pressure, system damp and working frequency, it is concluded that the decrease of chamber height will enhance the working frequency and stabilization. Then the vibrator structure parameters were confirmed through computing the influence law between vibrator structure parameter and amount of deformation. The conclusions show that the best thickness ratio is from 0.45 to 0.55 and the best diameter ratio is 0.8 to 0.9 between piezoelectric ceramic layer and the metal plate layer, respectively. The influence of the output form on the output ability also be considered, the result shows that axial output is in favor of the enhamement the output ability of the pump.